Preparation of Er2O3 film by magnetron sputtering and its mechanical properties

Abstract:

Surface nanocrystallization can significantly improve the surface mechanical properties of metal materials and promote the thermal diffusion of atoms. This article attempts to use surface nanotechnology to improve the mechanical properties of the combination of 316L stainless steel metal substrate and Er2O3 thin film. The supersonic particle bombardment of 316L stainless steel was used to nanometerize the surface of the substrate, and then magnetron sputtering was used to deposit an erbium oxide film on the nanometerized and coarse-grained 316L stainless steel substrate and anneal at 500 ℃ and 700 ℃. The phase structure of the thin film was basically stable when annealed at 500 ℃. The erbium oxide film undergoes an obvious monoclinic to cubic phase transition when annealed at 700 ℃. Using X-ray diffraction (XRD), field emission scanning electron microscope (SEM) and friction test to evaluate the bonding properties of the film substrate. The results show that the annealed SEM image at 700 ℃ has fewer cracks and is smoother than that at 500 ℃, and it is proved that the nanometerization of the substrate will improve the bonding performance of the film substrate.